TETRAKIS(TRIMETHYLSILYLOXY)SILANE 97%

Application

Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.

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UPC:

12190000

Condition:

New

Weight:

1.00 Ounces

HazmatClass:

Yes

Quantity:

5

Unit of Measurement:

ML

MPN:

454516-5ML

CAS:

3555-47-3